Seminar PVD-/CVD Processes 

1. Fundamentals, basic function of PVD / CVD processes
2. Physical requirements
3. PVD-processes (thermal evaporation, sputtering, reactive sputtering, electron beam evaporation, ...)
4. CVD-processes (metal-CVD, non-metal-CVD, plasma enhanced CVD (PECVD), ...)
5. Discussion of specific process problems

Target:

Basic understanding of PVD / CVD processes and the reactions during these processes. Better un- derstanding of the own application.

Target Group:

Participants with basic knowledge of vacuum technology. Mechanics, commissioning engineers, service personnel, shift supervisors / foremen, maintenance personnel, etc.

Recommended Duration:

1 day per process (CVD, PVD)