Seminar PVD-/CVD Processes
- Fundamentals, basic function of PVD / CVD processes
- Physical requirements
- PVD-processes (thermal evaporation, sputtering, reactive sputtering, electron beam evaporation, ...)
- CVD-processes (metal-CVD, non-metal-CVD, plasma enhanced CVD (PECVD), ...)
- Discussion of specific process problems
Basic understanding of PVD / CVD processes and the reactions during these processes. Better un- derstanding of the own application.
Participants with basic knowledge of vacuum technology. Mechanics, commissioning engineers, service personnel, shift supervisors / foremen, maintenance personnel, etc.
1 day per process (CVD, PVD)